General Process Change Qualification framework for Wafer Fabrication

International Conference on Recent Advances in Industrial Engineering and Manufacturing

工业技术（总论）

Nair, D.S.^1 ; Chin, J.F.^1

School of Mechanical Engineering, Engineering Campus, Universiti Sains Malaysia, Nibong Tebal, Penang

14300, Malaysia^1

关键词: Framework;    Industry standards;    Production performance;    Qualification;    Qualification process;    Semiconductor industry;    Semiconductor manufacturing;    Value-added process;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/530/1/012035/pdf
DOI  :  10.1088/1757-899X/530/1/012035

学科分类：工业工程学

来源: IOP

【 摘 要 】

Wafer fabrication is the most value-added processes of semiconductor and electronics industries. The involved processes are state-of-the-art, most expensive, most complicated and highly sensitive. Any process changes require qualification dictated by different industry standards and also internal production performance specifications. The way a semiconductor industry performs qualification is often little known outside the industry and in contemporary literature. The paper offers insights into qualification process for wafer fabrication. Literature is reviewed on qualification in terms of reasons, stages and considerations. A general qualification framework currently employed in a foundry is shared as a valuable example.