Temperature effect on pull-off force for gold cantilevers array

4th International Conference on Structural NanoComposites

Birleanu, C.^1 ; Pustan, M.^1 ; Serdean, F.^1 ; Merie, V.^2 ; Craciun, S.^1

Department of Mechanical Systems Engineering, Micro and Nano Systems Laboratory, Technical University of Cluj-Napoca, Cluj-Napoca, Romania^1

Department of Materials Science and Engineering, Micro and Nano Systems Laboratory, Technical University of Cluj-Napoca, Cluj-Napoca, Romania^2

关键词: Bending stiffness;    Mechanical behaviour;    MEMSDevices;    Micro-cantilevers;    Pull-off forces;    Temperature influence;    Young modulus;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/499/1/012004/pdf
DOI  :  10.1088/1757-899X/499/1/012004

来源: IOP

【 摘 要 】

This paper focuses on revealing the length influence of a group of gold cantilevers on the mechanical behaviour (i.e. bending stiffness, Young modulus, pull-off force) on the one hand and on the investigation of the temperature influence on the pull-off force of thermally actuated microcantilevers, on the other hand. The length was ranged between 200 μm and 350 μm while the temperature was ranged between 20 °C to 100 °C. The tests were performed using an atomic force microscope. The results obtained in the study are important to enhance the design of MEMS devices and to increase their reliability and their lifetime.