Effect of silver incorporation on the structural and morphological characteristics of RF sputtered indium oxide films

4th International Conference on Structural NanoComposites

Satheesh, Silpa B.^1 ; Kavitha, V.S.^1 ; Krishnan, Reshmi^1 ; Chalana, S.R.^1 ; Suresh, S.^1 ; Radhakrishna, Prabhu^2 ; Mahadevanpillai, V.P.^1

Department of Optoelectronics, University of Kerala, Thiruvananthapuram, Kerala

695581, India^1

School of Engineering, Robert Gordon University, Aberdeen

AB10 7GJ, United Kingdom^2

关键词: Distribution of grains;    Energy dispersive spectroscopies (EDS);    Field emission scanning electron microscopy;    Indium oxide thin films;    Micro Raman Spectroscopy;    Morphological characteristic;    Radio-frequency (rf) magnetron;    Structural and morphological properties;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/499/1/012001/pdf
DOI  :  10.1088/1757-899X/499/1/012001

来源: IOP

【 摘 要 】

Radio frequency (RF) magnetron sputtered silver incorporated indium oxide thin films were prepared and their structural and morphological properties were studied using micro-Raman spectroscopy, Atomic Force Microscopy (AFM), Field Emission Scanning Electron Microscopy (FESEM) and Energy Dispersive Spectroscopy (EDS). Raman modes corresponding to the cubic bixbyite phase of indium oxide were obtained through micro-Raman spectroscopy. AFM images exhibited dense distribution of grains. Elemental analysis using EDS spectra confirmed the presence of indium, silver and oxygen in the prepared films.