Perspective technology for low-scale production of SMD MOX gas sensors

2nd International Telecommunication Conference "Advanced Micro- and Nanoelectronic Systems and Technologies"

Samotaev, N.N.^1 ; Oblov, K.Y.^1 ; Ivanova, A.V.^1

National Research Nuclear University MEPhI, Moscow Engineering Physics Institute, Kashirskoe shosse 31, Moscow

115409, Russia^1

关键词: Economic aspects;    Micro hotplate;    Micro milling;    Mox sensors;    Small-scale production;    SMD packages;    Technical factors;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/498/1/012034/pdf
DOI  :  10.1088/1757-899X/498/1/012034

来源: IOP

【 摘 要 】

The article discusses technological and economic aspects of small-scale production of gas MOX sensors. The main technical factors affecting the use of sensors in various applications are described. The perspective laser micro-milling technology for ceramic MEMS producing of microhotplate and SMD package for the MOX sensor is discussed.