The dependence of ellipsometric parameters Δ and Ψ on refractive index of superficial film

International Conference on Applied Sciences

自然科学（总论）

Berdie, A.D.^1 ; Berdie, A.A.^2 ; Jitian, S.^1

Politehnica University of Timisoara, Department of Electrical Engineering and Industrial Informatics, 5 Revolutiei Str., Hunedoara

331128, Romania^1

Lucian Blaga University, Faculty of Letters and Arts, 5-7 Bd. Victoriei, Sibiu

550024, Romania^2

关键词: Ellipsometric measurements;    Ellipsometric parameters;    Specular reflections;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/477/1/012028/pdf
DOI  :  10.1088/1757-899X/477/1/012028

学科分类：自然科学（综合）

来源: IOP

【 摘 要 】

The ellipsometrical analysis of external specular reflection of light on non-absorbing superficial films allows us to know factors which influence the ellipsometric measurement of the analyzed system. For optical non-absorbing superficial films the curves Δ = f(Ψ) are closed, the curves Δ = f(df) and Ψ = f(df) are periodical, while the curves Δ = f(nf) and Ψ = f(nf) are pseudo-periodic. Observations on the dependence of the ellipsometric parameters Δ and Ψ on nf are presented.