科研项目详细信息
Microsystems: Mechanical Properties and Reliability of Micro Actuators Made from Polymer Materials
Hierold Christofer
ETH Zurich - ETHZ
keywords:microsystems; polymer; micro actuator; material properties; MEMS; Properties; Characterization; Cantilever; Dynamic; Microresonator; Modulus; Viscoelasticity; Actuator
keywords:
Subject:社会科学、人文和艺术(综合)
瑞士|英语
2008至2008
Source: 瑞士国家科学基金会
Link: http://p3.snf.ch/Pages/DataAndDocumentation.aspx