科研项目详细信息
HF Vapor Etcher for Stiction Free Release of Suspended Micro- and Nanostructures
Quack Niels
EPF Lausanne - EPFL
keywords:Stiction; Nano; Anhydrous; MEMS; Release; NEMS; MOEMS
keywords:
Subject:社会科学、人文和艺术(综合)
瑞士|英语
2017至2017
Source: 瑞士国家科学基金会
Link: http://p3.snf.ch/Pages/DataAndDocumentation.aspx