科研项目详细信息
SBIR Phase II: Chemically Impregnated Nanoparticles for Use in Copper Chemical Mechanical Planarization Slurry | |
Robin Ihnfeldt | |
General Engineering & Research, L.L.C. | |
Subject:工程和技术(综合) | |
美国|英语 | |
01至01 | |
Source: National Science Foundation |