科研项目详细信息
| Characterization and Real Time Defect Mitigation in Chemical/Mechanical Polishing of Microelectronic Wafers Using Decision Theory and MultiSensor Fusion | |
| Satish Bukkapatnam | |
| Texas A&M Engineering Experiment Station | |
| 美国|英语 | |
| 01至01 | |
| Source: National Science Foundation |