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1 Multigate MOSFETs for digital performance and high linearity, and their fabrication techniques [学位论文]

作者:Song, Yi   

论文开放时间:2016

关键词:Multigate;MOSFETs;...

培养单位:

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2 Uniform high-aspect-ratio 3D micro-and nanomanufacturing on silicon by (electro)-metal-assisted chemical etching: fundamentals and applications [学位论文]

作者:Li, Liyi, Wong, C. P. Materials Science and Engineering Wang, Zhong Lin Gerhardt, Rosario Singh, Preet Ayazi, Farrokh, Wong, C. P.   

论文开放时间:2016

关键词:Silicon etching;High aspect ratio;...

培养单位:University:Georgia Institute of Technology

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3 Micromachined capacitive silicon bulk acoustic wave gyroscopes [学位论文]

作者:Johari, Houri, Mechanical Engineering   

论文开放时间:2008

关键词:Gyroscopes;MEMS;...

培养单位:University:Georgia Institute of Technology

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