1 Fundamental limitations of LIGA x-ray lithography : sidewall offset, slope and minimum feature size. [科技报告]
作者:Griffiths, Stewart K.
发布日期:2004
关键词:Dimensions;43 Particle Accelerators;...
发布机构:Sandia National Laboratories
作者:Felter, Thomas E. (Lawrence Livermore National Laboratory, Livermore, CA), Antolak, Arlyn J., Bench, Graham (Lawrence Livermore National Laboratory, Livermore, CA)
发布日期:2004
关键词:Lawrence Livermore National Laboratory;Protons;...
发布机构:Sandia National Laboratories