来源:Micro & nano letters , 2015
作者:Qiang Shen;Wei Zheng Yuan;He Li;等
关键词:silicon-on-insulator;micromechanical devices;...
使用许可:CC BY
来源:Micro & nano letters , 2015
作者:Qiang Shen;Wei Zheng Yuan;He Li;等
关键词:silicon-on-insulator;micromechanical devices;...
使用许可:CC BY