1 Studying the Effect of Deposition Conditions on the Performance and Reliability of MEMS Gas Sensors [期刊论文]
来源:Sensors , 2007
作者:Khaled Sadek
关键词:MEMS gas sensors;Microfabrication;...
使用许可:Unknown
1 Studying the Effect of Deposition Conditions on the Performance and Reliability of MEMS Gas Sensors [期刊论文]
来源:Sensors , 2007
作者:Khaled Sadek
关键词:MEMS gas sensors;Microfabrication;...
使用许可:Unknown