• 已选条件：
  • × 3rd International School and Conference on Optoelectronics, Photonics, Engineering and Nanostructures (Saint Petersburg OPEN 2016
  • × Low pressures
 全选  【符合条件的数据共：2条】

1 Precise mass detector based on "W needle - C nanowire" nanomechanical system [会议论文]

作者:Lukashenko, S.Y.^1,2;Komissarenko, F.E.^1,3;Mukhin, I.S.^3;等

关键词:Amplitude frequency characteristics;Dielectrophoretic forces;...

会议举办机构:Department of Nanotechnology and Material Science, ITMO University, Kronverskiy av. 49, St. Petersburg

会议时间:2016

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2 CF3Br plasma cryo etching of low-k porous dielectric [会议论文]

作者:Clemente, I.^1,2;Koehler, N.^3;Miakonkikh, A.^1,2;等

关键词:DC voltage;Ellipsometric porosimetry;...

会议举办机构:Institute of Physics and Technology, Moscow

会议时间:2016

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