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  • × 12th International Conference on Gas Discharge Plasmas and Their Application
  • × 620016, Russia^1
  • × High current electron beams
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1 Magnetron sputtering system for coatings deposition with activation of working gas mixture by low-energy high-current electron beam [会议论文]

作者:Gavrilov, N.V.^1;Kamenetskikh, A.S.^1;Men'Shakov, A.I.^1;等

关键词:High current electron beams;High-current pulse discharge;...

会议举办机构:Institute of Electrophysics, 106 Amundsen str., Yekaterinburg

会议时间:2015

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