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  • × 13th International Conference on Films and Coating
  • × Institute of Problems of Mechanical Engineering, Russian Academy of Sciences, Saint Petersburg
  • × Emission spectrums
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1 Spectral analysis of the charge and elemental composition of the vacuum arc discharge plasma flux during deposition of carbon coatings [会议论文]

作者:Kostrin, D.K.^1, Trifonov, S.A.^1, Lisenkov, A.A.^2

关键词:Carbon coating;Elemental compositions;...

会议举办机构:Department of Electronic Instruments and Devices, Saint Petersburg Electrotechnical University LETI, Saint Petersburg

会议时间:2017

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