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  • × 24th International Conference on Vacuum Technique and Technolog
  • × 197376, Russia^1
  • × Emission spectrums
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1 Modelling emission spectra of the gas-discharge plasma for the aims of its analysis and parameters estimation [会议论文]

作者:Kostrin, D.K.^1;Lisenkov, A.A.^2;Uhov, A.A.^1;等

关键词:Coating deposition;Electronic transition;...

会议举办机构:Department of Electronic Instruments and Devices, Saint Petersburg Electrotechnical University, LETI, Saint Petersburg

会议时间:2017

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