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1 Comparative analysis of electrophysical properties of ceramic tantalum pentoxide coatings, deposited by electron beam evaporation and magnetron sputtering methods [会议论文]

作者:Donkov, N.^1;Mateev, E.^1;Safonov, V.^2;等

关键词:Comparative analysis;Dielectric parameters;...

会议举办机构:Emil Djakov Institute of Electronics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee, Sofia

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