• 已选条件：
  • × Department of Mechanical Engineering, Sikkim Manipal Institute of Technology, Sikkim, India^1
  • × Thin-film coatings
 全选  【符合条件的数据共：2条】

1 Synthesis and characterization of Titanium Silicon Nitride (TiSiN) thin film: A review [会议论文]

作者:Guha, Spandan^1;Bandyopadhyay, Asish^2;Das, Santanu^3;等

关键词:Chemical vapour deposition;Deposition technique;...

会议举办机构:Department of Mechanical Engineering, Sikkim Manipal Institute of Technology, Sikkim, India^1

会议时间:2018

预览  |  原文链接  |  全文  [ 浏览：3 下载：1  ]    

2 Morphological and Structural Properties of CVD Deposited Titanium Aluminium Nitride (TiAlN) Thin Films [会议论文]

作者:Das, Soham^1;Guha, Spandan^1;Ghadai, Ranjan^1;等

关键词:Chemical vapour deposition;Compositional characteristics;...

会议举办机构:Department of Mechanical Engineering, Sikkim Manipal Institute of Technology, Sikkim, India^1

会议时间:2018

预览  |  原文链接  |  全文  [ 浏览：8 下载：0  ]