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  • × Micro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zurich, Tannenstrasse 3, Zurich
  • × Micro-fabrication techniques
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1 Bottom-up silicon nanowire-based thermoelectric microgenerators [会议论文]

作者:Dávila, D.^1, Huber, R.^1, Hierold, C.^1

关键词:Micro-fabrication techniques;Patterned microstructures;...

会议举办机构:Micro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zurich, Tannenstrasse 3, Zurich

会议时间:2015

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