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1 XPS study of nanoscale SiOxNy layers synthezised by plasma immersion implantation of nitrogen [会议论文]

作者:Alexandrova, S.^1;Halova, E.^1;Bakalova, S.^2;等

关键词:Atomic concentration;Dry oxygen;...

会议举办机构:Technical University of Sofia, 8 Kl. Ohridski Blvd., 1797 Sofia, Bulgaria^1

会议时间:

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