1 Radial profile of the electron energy distribution function in RF capacitive gas-discharge plasma [会议论文]
作者:Dimitrova, M.^1;Popov, Tsv^2;Puac, N.^3;等
关键词:Capacitively coupled plasmas;Electron energy distribution functions;...
会议举办机构:Acad. E. Djakov Institute of Electronics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee, Sofia
会议时间:2016