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× Micro-fabrication techniques
作者:Shishido, Hiroaki^1,2;Nakagami, Takatoshi^1;Yoshida, Takuya^1;等
关键词:Low growth temperature;Low substrate temperature;...
会议举办机构:Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University, Sakai, Osaka
会议时间:2017
2 A monolithic integrated micro direct methanol fuel cell based on sulfo functionalized porous silicon [会议论文]
作者:Wang, M.^1,2;Lu, Y.X.^1,3;Liu, L.T.^1;等
关键词:Desirable features;Functionalized;...
会议举办机构:Insititute of Microelectronic, Tsinghua University, Beijing
会议时间:2016
作者:Dávila, D.^1, Huber, R.^1, Hierold, C.^1
关键词:Micro-fabrication techniques;Patterned microstructures;...
会议举办机构:Micro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zurich, Tannenstrasse 3, Zurich
会议时间:2015