A study of defect distribution of BaTiO3 dielectrics in MLCC by TEM-CL

620.1;

투과전자현미경 ;

University:서울대학교 대학원

关键词: 620.1;   

Others  :  http://s-space.snu.ac.kr/bitstream/10371/150714/1/000000154990.pdf

美国|英语

来源: Seoul National University Open Repository

【 摘 要 】

firstly, the band gap structure and energy levels were revealed. Through monochromatic CL images of each types of defects (oxygen and barium vacancies), their distribution and relative concentration were visualized. In addition, two unreported peaks were found. The explanation for this could be probably because of the fact that TEM had better resolution and higher magnification as compared to SEM. Regarding the two unreported peaks which were found, we estimated that they were from dopants since in MLCC, many elements are added for reliability. To identify the origin of the two unreported peaks, the monochromatic images were subjected tofurther investigations along with Energy Dispersive X-Ray Spectroscopy(EDS) mapping. The peaks were found to be Zirconium (Zr) and yttrium (Y). Their concentrations and distributions were alsovisualized.It is thought that these results can benefit in visualization of invisible defects as well as understanding of the emission behavior of BaTiO3 microstructure