Parylene Microcolumn for Miniature Gas Chromatograph

MEMS;Microchannels;Microcolumns;Gas chromatography;Parylene

Noh, Hongseok "Moses" ; Mechanical Engineering

University:Georgia Institute of Technology

Department:Mechanical Engineering

关键词: MEMS;    Microchannels;    Microcolumns;    Gas chromatography;    Parylene;   

Others  :  https://smartech.gatech.edu/bitstream/1853/4983/1/Noh_Hongseok_200407_PHD.pdf

美国|英语

来源: SMARTech Repository

【 摘 要 】

This research contributes to worldwide efforts to miniaturize one of the most powerful and versatile analytical tools, gas chromatography (GC). If a rapid, sensitive and selective hand-held GC system is realized, it would have a wide range of applications in many industries and research areas. As a part of developing a hand-held GC system, this research focuses on the separation column, which is the most important component of a GC system. This thesis describes the development of a miniature separation column that has low thermal mass and an embedded heating element for rapid thermal cycling. The worlds first thin polymer film (parylene) GC column has been successfully developed. This thesis includes: first, a study of theoretical column performance of rectangular GC column; second, the design optimization of parylene column and embedded heating element; third, the development of new processes such as parylene micromolding and stationary phase coating technique for parylene column; fourth, the fabrication of parylene GC column with an embedded heating element; and lastly, the testing and evaluation of parylene GC column through GC analysis.