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Use of photosensitive metal-organic precursors to deposit metal-oxides for thin-film capacitor applications |
Metallic oxides;Semiconductors Materials;Printed circuits Materials;Thin-film circuits Materials |
Barstow, Sean J. ; Chemical Engineering |
University:Georgia Institute of Technology |
Department:Chemical Engineering |
关键词:
Metallic oxides;
Semiconductors Materials;
Printed circuits Materials;
Thin-film circuits Materials;
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Others : https://smartech.gatech.edu/bitstream/1853/5385/1/barstow_sean_j_200312_phd.pdf |
美国|英语 |
来源:
SMARTech Repository |
PDF
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