Use of photosensitive metal-organic precursors to deposit metal-oxides for thin-film capacitor applications

Metallic oxides;Semiconductors Materials;Printed circuits Materials;Thin-film circuits Materials

Barstow, Sean J. ; Chemical Engineering

University:Georgia Institute of Technology

Department:Chemical Engineering

关键词: Metallic oxides;    Semiconductors Materials;    Printed circuits Materials;    Thin-film circuits Materials;   

Others  :  https://smartech.gatech.edu/bitstream/1853/5385/1/barstow_sean_j_200312_phd.pdf

美国|英语

来源: SMARTech Repository