Modeling and controlling thermoChemical nanoLithography

Gradients;ThermoChemical nanolithography;Chemical kinetics;Thermal cantilevers;Nanoscale patterning

Carroll, Keith Matthew ; Curtis, Jennifer E. Physics Riedo, Elisa Marder, Seth R. Kim, Harold D. Bottomley, Lawrence A. ; Curtis, Jennifer E.

University:Georgia Institute of Technology

Department:Physics

关键词: Gradients;    ThermoChemical nanolithography;    Chemical kinetics;    Thermal cantilevers;    Nanoscale patterning;   

Others  :  https://smartech.gatech.edu/bitstream/1853/52962/1/CARROLL-DISSERTATION-2013.pdf

美国|英语

来源: SMARTech Repository

【 摘 要 】

Thermochemical Nanolithography (TCNL) is a scanning probe microscope (SPM) based lithographic technique modified with a semi-conducting cantilever.This cantilever is capable of locally heating a surface and with a well-engineered substrate, this spatially confined heating induces chemical or physical transformation.While previous works focused primarily on proof of principle and binary studies, there is limited research on controlling and understanding the underlying mechanisms governing the technique.In this thesis, a chemical kinetics model is employed to explain the driving mechanisms and to control the technique.The first part focuses on studying surface reactions.By coupling a thermally activated organic polymer with fluorescence microscopy, the chemical kinetics model is not only verified but also applied to control the surface reactions.The work is then expanded to include 3D effects, and some preliminary results are introduced.Finally, applications are discussed.