Acoustic wave biosensor arrays for the simultaneous detection of multiple cancer biomarkers

ZNO;Bulk acoustic wave;Energy trapping;Acoustic sensors;Biosensors;Bulk acoustic delay line;SMR

Wathen, Adam Daniel ; Electrical and Computer Engineering

University:Georgia Institute of Technology

Department:Electrical and Computer Engineering

关键词: ZNO;    Bulk acoustic wave;    Energy trapping;    Acoustic sensors;    Biosensors;    Bulk acoustic delay line;    SMR;   

Others  :  https://smartech.gatech.edu/bitstream/1853/42717/1/wathen_adam_d_201112_phd.pdf

美国|英语

来源: SMARTech Repository

【 摘 要 】

The analysis and development of robust sensing platforms based on solidly-mounted ZnO bulk acoustic wave devices was proposed.The exploitation of acoustic energy trapping was investigated and demonstrated as a method to define active sensing areas on a substrate.In addition, a new "hybrid" acoustic mode experiencing acoustic energy trapping was studied theoretically and experimentally.This mode was used as an explanation of historical inconsistencies in observed thickness-shear mode velocities.Initial theoretical and experimental results suggest that this mode is a coupling of thickness-shear and longitudinal particle displacements and, as such, may offer more mechanical and/or structural information about a sample under test.Device development was taken another step further and multi-mode ZnO resonators operating in the thickness-shear, hybrid, and longitudinal modes were introduced.These devices were characterized with respect to sample viscosity and conductivity and preliminary results show that, with further development, the multi-mode resonators provide significantly more information about a sample than their single-mode counterparts.An alternative to resonator-based platforms was also presented in the form of bulk acoustic delay lines.Initial conceptual and simulation results show that these devices provide a different perspective of typical sensing modalities by using properly designed input pulses, device tuning, and examining overall input and output signal spectra.