Characterization of High-k Dielectrics and Interfaces on Device Reliability

High-k Dielectrics MOSFET Spectrosopic Ellipsometr

Seo, Hyungtak ; Dr. Carl Osbrun, Committee Chair,Dr. Gerald Lucovsky, Committee Co-Chair,Dr. David Aspnes, Committee Member,Dr. Veena Misra, Committee Member,Seo, Hyungtak ; Dr. Carl Osbrun ; Committee Chair ; Dr. Gerald Lucovsky ; Committee Co-Chair ; Dr. David Aspnes ; Committee Member ; Dr. Veena Misra ; Committee Member

University:North Carolina State University

关键词: High-k Dielectrics MOSFET Spectrosopic Ellipsometr;   

Others  :  https://repository.lib.ncsu.edu/bitstream/handle/1840.16/3639/etd.pdf?sequence=1&isAllowed=y

美国|英语

来源: null