This thesis reports electrohydrodynamic jet printing to deposit 2 – 27 um diameter polymer droplets onto microcantilever sensors.The polymer droplets were deposited as single droplets or organized patterns, with sub-μm control over droplet diameter and position.The droplet size could be controlled through a pulse-modulated source voltage, while droplet position was controlled using a positioning stage.Gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition.The resonance shift of 50 - 4130 Hz corresponded to a polymer mass of 4.5 - 135 pg.The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution and repeatability than current methods.
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High precision electrohydrodynamic printing of polymer onto microcantilever sensors