Capacitive thermal management in electronics requires an enhancement in the volumetric storage density of compatible materials to approximately 1 GJ/m3. We investigate potential enhancement in sensible storage density arising from size e ects in thin polymerlms. We design and fabricate a micro-calorimeter to measure the volumetric heat capacity of nanometerscale thinuorocarbon polymerlms. The storage density increases approximately three times as thelm thickness decreases from 27 nm to 12nm. Using the Debye theory of phonons, we relate this behavior to an increase in the Gr uneisen parameter with decreasinglm thickness. This work advances the understanding of size dependence in the heat capacity of amorphouspolymers as well as highlights their potential for capacitive thermalmanagement.
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Volumetric heat capacity enhancement in ultrathin fluorocarbon polymers for capacitive thermal management