Position and velocity sensing measurements using an integrated VCSEL and pin photodetector assembly

vertical-cavity surface-emitting laser (VCSEL);p-type/intrinsic/n-type (PIN) photodetector;position;velocity;integrated;sensing

Jefvert, Thomas M. ; Choquette ; Kent D.

关键词: vertical-cavity surface-emitting laser (VCSEL);    p-type/intrinsic/n-type (PIN) photodetector;    position;    velocity;    integrated;    sensing;   

Others  :  https://www.ideals.illinois.edu/bitstream/handle/2142/24383/Jefvert_Thomas.pdf?sequence=1&isAllowed=y

美国|英语

来源: The Illinois Digital Environment for Access to Learning and Scholarship

【 摘 要 】

A position sensing optical microsystem that is low-power, non-contact and long-range was characterized. A vertical-cavity surface-emitting laser monolithically integrated with a photodetector packaged in a low profile assembly was used in conjunction with a metallic optical grating. By observing the modulated reflection of laser light off the grating collected by the detector,we can determine the speed and/or the relative position of the grating. The capability of the assembly as a sensor was investigated using a motorizedstage and an air gantry motion system. On the air gantry system, the position sensing assembly measured the distance traveled to within 0.875 microns and the velocity to within 3% of the speed measured by conventional means.With the linear actuator, due to the discrete steps of operation, the measured distance was within 3.5 microns and the velocity to within 60%.