Self-rolled-up membrane (S-RuM) is a novel technology to build precisely controllable three- dimensional (3D) micro-structures. This technology finds wide applications in passive electronics, photonics, and neural interfaces, and achieves great device size reduction and performance enhancement. For passive electronics, devices based on S-RuM utilize electromagnetic energy well- confined in the device tubular cavity with extremely high efficiency, and break the footprint and parasitic effect limit set by conventional planar devices. S-RuM inductors and capacitors can reach self- resonant frequency up to 60 GHz, Q factor up to 80, and with footprint one hundredth that of the state- of-the-art 2D counterparts. This thesis illustrates the working mechanism of S-RuM technology first, and then introduces S-RuM passive electronic devices for radio frequency (RF) application. Current approaches to improve RF passive device performance are discussed. Designs of capacitors and filters based on S-RuM are demonstrated, followed by simulation and lab measurement results. Challenges associated with S-RuM passive electronics are addressed and solutions are proposed. Future work and potential wearable device applications are summarized.
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Self-rolled-up membrane (S-RuM) capacitors and filters for radio frequency communication