Further analysis of solid state superionic stamping for nanoscale fabrication

S4;nano-imprint

Qian, Boqiang ; Ferreira ; Placid M

关键词: S4;    nano-imprint;   

Others  :  https://www.ideals.illinois.edu/bitstream/handle/2142/105711/QIAN-THESIS-2019.pdf?sequence=1&isAllowed=y

美国|英语

来源: The Illinois Digital Environment for Access to Learning and Scholarship

【 摘 要 】

The nanopattern print and etch process has played a significant role in the development of the modern technology. Our group has already developed the electrochemical nano-imprint process called solid state superionic stamping (S4) using AgIAgPO& glass as the solid electrolyte to pattern and transfer nanostructures on the silver. This technology is economically low-cost, high efficiency, and environmentally friendly. The whole process will not generate liquid waste or particles. In this thesis, we will review the process of how to make AgIAgPO& glass. Then, the method of how to scale up the S4 stamp from 5mm to 1-inch in diameter based on the previous study will be introduced. Also, the design process of the plate-to-roll system for high-volume manufacturing will be analyzed. Finally, to ensure the quality of the nanostructure and the lifetime of the stamp use, the effects of the rolling parameters including rolling speed, etching force, and patterning current or voltage will be studied.