Semiconductor Quantum-Well Extended Cavity Lasers and Deep-Surface Gratings for Distributed Bragg Reflector Lasers

Electrical engineering, Condensed matter physics, Electromagnetics, Optics

Yee, Hoshin Hocking

University:University of Glasgow

关键词: Electrical engineering, Condensed matter physics, Electromagnetics, Optics;   

Others  :  http://theses.gla.ac.uk/75500/1/13832099.pdf

来源: University of Glasgow

【 摘 要 】

This thesis is concerned with two different kinds of optoelectronic component. The first of these is an extended-cavity laser diode, with results for both oxide-stripe and ridge waveguide structures. The impurity free vacancy diffusion (IFVD) technique was used to reduce the propagation losses of the passive waveguide section. A low- damage and high-selectivity dry etching technique, magnetically-confined-plasma reactive ion etching (MCP RIE), was used particularly for the ridge waveguide etch. The second focus is on deep surface gratings, fabricated by the two-beam interference technique, for distributed Bragg reflector laser diodes. The impact of native oxide on the quantum well intermixing was investigated in detail and a model was adopted to interpret the native oxide effects on the impurity-free vacancy diffusion. It was found that a 24-nm blue shift in the disordered region was obtained for the samples annealed at 940