Design and Implementation of a High Resolution CMOS X-Ray Imager with Amorphous Selenium Sensor

High resolution X-ray imager;amorphouse selenium sensor;3T APS pixel;3T APS pixel;X-ray imaging system;CMOS readout;Electrical and Computer Engineering

Parsafar, Alireza

University of Waterloo

关键词: High resolution X-ray imager;    amorphouse selenium sensor;    3T APS pixel;    3T APS pixel;    X-ray imaging system;    CMOS readout;    Electrical and Computer Engineering;   

Others  :  https://uwspace.uwaterloo.ca/bitstream/10012/9355/3/Parsafar_Alireza.pdf

瑞士|英语

来源: UWSPACE Waterloo Institutional Repository

【 摘 要 】

This thesis presents a novel system for high resolution X-ray imaging in medical andindustrial applications. Complementary metal-oxide-semiconductor (CMOS) technology isa standard technology used in most state of the art electronic systems including imagers.In addition, amorphous selenium (a-Se) is a photoconductor that is sensitive to a widerange of X-ray photon energies.Increasing the e ective spatial resolution is one the primary goals of state of the artimaging systems. The objective of this thesis is to integrate the a-Se sensor and CMOSreadout to make an ultra high resolution X-ray imager. Other features of the imager likenoise, dynamic range, imaging speed, andll factor are competitive with existing X-rayimaging systems. All of the signal reading circuitry is implemented on a custom CMOSchip and the a-Se sensor is deposited on top of it through post processing. This thesisalso describe the design of external hardware and software needed to properly operate theimager.We demonstrate our imager with a 64 × 64 pixel array prototype containing 5.6 × 6.25μm2 and 11.2 × 6.25μm2 pixel. Our results include characterization of the electronicand X-ray imaging performance of our system. We also show X-ray images with e ectiveresolution down to 14μm.