This thesis was developed to address the following questions for the Pb/Si(111) system: (1) Is it possible to control the nano-structure growth by changing the initial substrate; (2) is the nucleation theory applicable to the case of the 7-step growth mode; and (3) what phase or phases could be formed between coverage 6/5 ML and 4/3 ML. The first question was answered in chapter 2, different growth results were observed for different initial substrate, suggesting the possibility of controlling nano-structure growth by selecting the initial substrate. The applicability of nucleation theory was determined to be unclear in chapter 3, from the results that the saturation island density does not depend on deposition rate, in contrary to the prediction of nucleation theory. Chapter 4 revealed a novel 'devil's staircase' in Pb/Si(111) within the coverage range 6/5 ML and 4/3 ML. Low temperature deposition experiments showed high order of self-organization in such a system. Theoretical studies are needed to understand such a low temperature behavior. In general, this thesis provides possibilities of controlling nano-structure growth, which can be possibly an indication for future application. It also raises interesting questions in fundamental researches: a modified theory of nucleation is needed, and a detailed study of low temperature behavior is required. Details of the conclusions in each of the chapters are collected in the following sections.