The lifetime of optics in high-fluence UV laser applications is typically limited by the initiation of damage and its subsequent growth. We have measured the growth rate of laser-induced damage on fused silica surfaces in both air and vacuum. The data shows exponential growth in the lateral size of the damage site with shot number above a threshold fluence. The concurrent growth in depth follows a linear dependence with shot number. The size of the initial damage influences the threshold for growth; the morphology of the initial site depends strongly on the initiating fluence. We have found only a weak dependence on pulse length for growth rate. Most of the work has been on bare substrates but the presence of a sol-gel AR coating has no significant effect.