Ion-Beam-Assisted Deposition of Magnesium Oxide Films for Coated Conductors.

Weber, T. P. ; Ma, B. ; Balachandran, U. ; McNallan, M.

Technical Information Center Oak Ridge Tennessee

关键词: Energy beam deposition;    Ion beams;    Laser radiation;    Yttrium oxides;    Barium oxides;   

RP-ID  :  DE200242850

学科分类：工程和技术（综合）

美国|英语

来源: National Technical Reports Library

【 摘 要 】

The development of high critical-temperature thin-film superconductors and coated conducting wires is important for electric power applications. To achieve high transport current density, template films are necessary for the successful deposition of biaxially aligned YBa2Cu3O7-x (YBCO) on flexible metal substrates. We grew biaxially aligned magnesium oxide (MgO) template films by ion-beam-assisted deposition with electron-beam evaporation. MgO films of approximately 100 angstroms thickness were deposited on Si3N4-coated Si substrates at a deposition rate of approximately 1.5 angstroms/sec with an ion flux of approximately 110 microA/cm2 bombarding the substrate at a 45 degree angle. To study crystalline structure by X-ray diffraction, we deposited an additional layer of MgO. Good in- and out-of-plane alignment was observed, with (111) -scan full-width half-maximum (FWHM) of 6.2 degrees and (002) micro-scan FWHM of 2.2 degrees.