MEMS Based Hybrid Preconcentrator/Chemiresistor Chemical Sensor.

Hughes, R. C. ; Patel, S. V. ; Manginell, R. P.

Technical Information Center Oak Ridge Tennessee

关键词: Sensors;    Detection;    Chemical analysis;    Desorption;    Heating;   

RP-ID  :  DE2001760779

学科分类：工程和技术（综合）

美国|英语

来源: National Technical Reports Library

【 摘 要 】

A hybrid of a microfabricated planar preconcentrator and a four element chemiresistor array chip has been fabricated and the performance as a chemical sensor system has been demonstrated. The close proximity of the chemiresistor sensor to the preconcentrator absorbent layer allows for fast transfer of the preconcentrated molecules during the heating and resorption step. The hybrid can be used in a conventional flow sampling system for detection of low concentrations of analyte molecules or in a pumpless/valveless mode with a grooved lid to confine the desorption plume from the preconcentrator during heating.