H-Diffusion Mechanism(s) in PECVD Nitride Passivation of Si Solar Cells: Preprint.

Sopori, B.

Technical Information Center Oak Ridge Tennessee

关键词: Meetings;    Hydrogen;    Diffusion;    Solar cells;    Silicon;   

RP-ID  :  DE200215000024

学科分类：工程和技术（综合）

美国|英语

来源: National Technical Reports Library

【 摘 要 】

Presented at the 2001 NCPV Program Review Meeting: Modeled diffusion of H in 2-step Si3N4 passivation process invoking concept of storage of H. H stored during nitridation is redistributed during subsequent anneal.