Nanostructured Vanadium Oxide Uncooled Bolometers and Method of Fabrication

Brown, Ari D [Inventor]Barrentine, Emily M [Inventor]Aslam, Shahid [Inventor]

关键词: NANOFABRICATION;    VANADIUM OXIDES;    BOLOMETERS;    INFRARED IMAGERY;    IMAGING TECHNIQUES;    THIN FILMS;    THERMAL RESISTANCE;    MICROSTRUCTURE;    SPECTRAL BANDS;    PATENTS;   

RP-ID  :  US-Patent-10,184,839, US-Patent-Appl-SN-15/691,109

学科分类：地球科学(综合)

美国|英语

来源: NASA Technical Reports Server

【 摘 要 】

The present invention relates to uncooled microbolometers which can be integrated in future thermal instruments engaged in land imaging on future observatories. The present invention includes: (1) developing and characterizing a microstructured VOx thin film, and, (2) fabricating an uncooled microbolometer array over the 8-14 micron spectral band.