Index-Coupled Distributed-Feedback Semiconductor Quantum Cascade Lasers Fabricated Without Epitaxial Regrowth

Briggs, Ryan M [Inventor]Frez, Clifford F [Inventor]Forouhar, Siamak [Inventor]

关键词: QUANTUM CASCADE LASERS;    SEMICONDUCTOR LASERS;    EPITAXY;    PATENTS;   

RP-ID  :  US-Patent-9,991,677, US-Patent-Appl-SN-14/711,695

学科分类：航空航天科学

美国|英语

来源: NASA Technical Reports Server

【 摘 要 】

Quantum cascade (QC) lasers and methods of fabricating such QC lasers are provided. The QC lasers incorporate a DFB grating without requiring the use of relying on epitaxial regrowth processes. The DFB gratings are formed as sidewall gratings along the lateral length of the QC active region, or the DFB gratings are formed atop the lateral length of the QC active region, and wherein the top DFB grating is planarized with a polymeric material.