Gas Sensors with Contact Pads

Xu, Jennifer [Inventor]Hunter, Gary W [Inventor]

关键词: GAS DETECTORS;    SCHOTTKY DIODES;    SILICON CARBIDES;    SUBSTRATES;    PATENTS;    BARRIER LAYERS;   

RP-ID  :  US-Patent-9,970,914, US-Patent-Appl-SN-14/679,278

学科分类：航空航天科学

美国|英语

来源: NASA Technical Reports Server

【 摘 要 】

Systems, methods, and other embodiments associated with gas detecting sensors. According to one embodiment, a gas sensor includes a metal layer, a barrier interlayer, a substrate layer, a first insulating layer, a conduction path, a contact pad, and a second insulating layer. The conduction path connects the metal layer to the contact pad. The second insulating layer prevents diffusion through the contact pad, the conduction path, or the metal layer. The sensor includes a wire bonded electrical connection to the contact pad such that voltage can be determined and/or applied.