Design of an RF Antenna for a Large0Bore, High Power, Steady State Plasma Processing Chamber for Material Separation

Rasmussen, D.A. ; Freeman, R.L.

Oak Ridge National Laboratory

关键词: 70 Plasma Physics And Fusion Technology;    Processing;    Optimization;    Deposition;    Design;   

DOI  :  10.2172/940406
RP-ID  :  ORNL00-0585
RP-ID  :  DE-AC05-00OR22725
RP-ID  :  940406

美国|英语

来源: UNT Digital Library

【 摘 要 】

The purpose of this Cooperative Research and Development Agreement (CRADA) between UT-Battelle, LLC, (Contractor), and Archimedes Technology Group, (Participant) is to evaluate the design of an RF antenna for a large-bore, high power, steady state plasma processing chamber for material separation. Criteria for optimization will be to maximize the power deposition in the plasma while operating at acceptable voltages and currents in the antenna structure. The project objectives are to evaluate the design of an RF antenna for a large-bore, high power, steady state plasma processing chamber for material separation. Criteria for optimization will be to maximize the power deposition in the plasma while operating at acceptable voltages and currents in the antenna structure.