Low-loss LIGA-micromachined conductor-backed coplanar waveguide.

Forman, Michael A.

Sandia National Laboratories

关键词: Copper;    Quartz;    Attenuation;    Nickel;    Radio Frequency Integrated Circuits.;   

DOI  :  10.2172/920817
RP-ID  :  SAND2004-5621
RP-ID  :  AC04-94AL85000
RP-ID  :  920817

美国|英语

来源: UNT Digital Library

【 摘 要 】

A mesoscale low-loss LIGA-micromachined conductor-backed coplanar waveguide is presented. The 517 {micro}m lines are the tallest uniplanar LIGA-fabricated microwave transmission lines to date, as well as the first to be constructed of copper rather than nickel. The conductor-backed micromachined CPW on quartz achieves a measured attenuation of 0.064 dB/cm at 15.5 GHz.