Erbium hydride thermal desorption : controlling kinetics.

Ferrizz, Robert Matthew

Sandia National Laboratories

关键词: Desorption;    Erbium Hydrides;    Thin Films-Materials.;    37 Inorganic, Organic, Physical And Analytical Chemistry;    Kinetics;   

DOI  :  10.2172/920769
RP-ID  :  SAND2007-2659
RP-ID  :  AC04-94AL85000
RP-ID  :  920769

美国|英语

来源: UNT Digital Library

【 摘 要 】

Thermal desorption spectroscopy (TDS) is used to study the decomposition kinetics of erbium hydride thin films. The TDS results presented in this report show that hydride film processing parameters directly impact thermal stability. Issues to be addressed include desorption kinetics for dihydrides and trihydrides, and the effect of film growth parameters, loading parameters, and substrate selection on desorption kinetics.