High fidelity frictional models for MEMS.

Carpick, Robert W. ; Reedy, Earl David, Jr. ; Bitsie, Fernando ; de Boer, Maarten Pieter ; Corwin, Alex David ; Ashurst, William Robert ; Jones, Reese E. ; Subhash, Ghatu S. ; Street, Mark D. ; Sumali, Anton Hartono ; Antoun, Bonnie R. ; Starr, Michael James ; Redmond, James Michael ; Flater, Erin E.

Sandia National Laboratories

关键词: Mathematical Models Finite Element Method-Simulation Methods.;    Friction-Measurement.;    Miniaturization;    Actuators;    Microelectronics;   

DOI  :  10.2172/919635
RP-ID  :  SAND2004-4791
RP-ID  :  AC04-94AL85000
RP-ID  :  919635

美国|英语

来源: UNT Digital Library

【 摘 要 】

The primary goals of the present study are to: (1) determine how and why MEMS-scale friction differs from friction on the macro-scale, and (2) to begin to develop a capability to perform finite element simulations of MEMS materials and components that accurately predicts response in the presence of adhesion and friction. Regarding the first goal, a newly developed nanotractor actuator was used to measure friction between molecular monolayer-coated, polysilicon surfaces. Amontons law does indeed apply over a wide range of forces. However, at low loads, which are of relevance to MEMS, there is an important adhesive contribution to the normal load that cannot be neglected. More importantly, we found that at short sliding distances, the concept of a coefficient of friction is not relevant; rather, one must invoke the notion of 'pre-sliding tangential deflections' (PSTD). Results of a simple 2-D model suggests that PSTD is a cascade of small-scale slips with a roughly constant number of contacts equilibrating the applied normal load. Regarding the second goal, an Adhesion Model and a Junction Model have been implemented in PRESTO, Sandia's transient dynamics, finite element code to enable asperity-level simulations. The Junction Model includes a tangential shear traction that opposes the relative tangential motion of contacting surfaces. An atomic force microscope (AFM)-based method was used to measure nano-scale, single asperity friction forces as a function of normal force. This data is used to determine Junction Model parameters. An illustrative simulation demonstrates the use of the Junction Model in conjunction with a mesh generated directly from an atomic force microscope (AFM) image to directly predict frictional response of a sliding asperity. Also with regards to the second goal, grid-level, homogenized models were studied. One would like to perform a finite element analysis of a MEMS component assuming nominally flat surfaces and to include the effect of roughness in such an analysis by using a homogenized contact and friction models. AFM measurements were made to determine statistical information on polysilicon surfaces with different roughnesses, and this data was used as input to a homogenized, multi-asperity contact model (the classical Greenwood and Williamson model). Extensions of the Greenwood and Williamson model are also discussed: one incorporates the effect of adhesion while the other modifies the theory so that it applies to the case of relatively few contacting asperities.