MEMS in microfluidic channels.

Ashby, Carol Iris Hill ; Okandan, Murat ; Michalske, Terry A. ; Sounart, Thomas L. ; Matzke, Carolyn M.

Sandia National Laboratories

关键词: Microelectromechanical Systems.;    Flow Rate;    Monitoring;    Electrostatics;    Ducts;   

DOI  :  10.2172/918744
RP-ID  :  SAND2004-1158
RP-ID  :  AC04-94AL85000
RP-ID  :  918744

美国|英语

来源: UNT Digital Library

【 摘 要 】

Microelectromechanical systems (MEMS) comprise a new class of devices that include various forms of sensors and actuators. Recent studies have shown that microscale cantilever structures are able to detect a wide range of chemicals, biomolecules or even single bacterial cells. In this approach, cantilever deflection replaces optical fluorescence detection thereby eliminating complex chemical tagging steps that are difficult to achieve with chip-based architectures. A key challenge to utilizing this new detection scheme is the incorporation of functionalized MEMS structures within complex microfluidic channel architectures. The ability to accomplish this integration is currently limited by the processing approaches used to seal lids on pre-etched microfluidic channels. This report describes Sandia's first construction of MEMS instrumented microfluidic chips, which were fabricated by combining our leading capabilities in MEMS processing with our low-temperature photolithographic method for fabricating microfluidic channels. We have explored in-situ cantilevers and other similar passive MEMS devices as a new approach to directly sense fluid transport, and have successfully monitored local flow rates and viscosities within microfluidic channels. Actuated MEMS structures have also been incorporated into microfluidic channels, and the electrical requirements for actuation in liquids have been quantified with an elegant theory. Electrostatic actuation in water has been accomplished, and a novel technique for monitoring local electrical conductivities has been invented.