The integration of advanced photonics and MEMS : LDRD 26519 final report.

Fleming, James Grant ; Lin, Shawn-Yu

Sandia National Laboratories

关键词: Testing;    Resonators;    36 Materials Science;    Waveguides;    Switches;   

DOI  :  10.2172/918267
RP-ID  :  SAND2003-4646
RP-ID  :  AC04-94AL85000
RP-ID  :  918267

美国|英语

来源: UNT Digital Library

【 摘 要 】

In this work we have demonstrated the fabrication of two different classes of devices which demonstrate the integration of simple MEMS structures with photonics structures. In the first class of device a suspended, movable Si waveguide was designed and fabricated. This waveguide was designed to be able to be actuated so that it could be brought into close proximity to a ring resonator or similar structure. In the course of this work we also designed a technique to improve the input coupling to the waveguide. While these structures were successfully fabricated, post fabrication and testing involved a significant amount of manipulation of the devices and due to their relatively flimsy nature our structures could not readily survive this extra handling. As a result we redesigned our devices so that instead of moving the waveguides themselves we moved a much smaller optical element into close proximity to the waveguides. Using this approach it was also possible to fabricate a much larger array of actively switched photonic devices: switches, ring resonators, couplers (which act as switches or splitters) and attenuators. We successfully fabricated all these structures and were able to successfully demonstrate splitters, switches and attenuators. The quality of the SiN waveguides fabricated in this work were found to be qualitatively compatible to those made using semiconductor materials.